| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9812630 | Thin Solid Films | 2005 | 4 Pages |
Abstract
a-Si/SiOx Bragg-reflectors for the wavelength region from 500 nm to 830 nm with a low number of pairs were grown on cylindrical half-pipes on InP substrates using plasma-enhanced chemical vapor deposition with regard to applications for the confinement of the optical modes in micro-resonators. The optical properties of the Bragg-reflectors were determined by the new method of detection-focal spatially resolved spectroscopic ellipsometry in combination with the confocal micro-reflection technique.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
R. Schmidt-Grund, T. Nobis, V. Gottschalch, B. Rheinländer, H. Herrnberger, M. Grundmann,