Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812636 | Thin Solid Films | 2005 | 5 Pages |
Abstract
Transparent conducting gallium-doped Zinc Oxide (ZnO:Ga) thin films were prepared on glass substrates by r.f. magnetron sputtering technique at low substrates temperature. The effects of post-annealing treatment on structural, electrical and optical properties of ZnO:Ga films were investigated. The results show that the annealing treatment leads to substational changes in the structural, electrical and optical characteristics of ZnO:Ga thin films. The electrical resistivity and the average transmittance of ZnO:Ga films were improved by annealing in vacuum ambient. The average transmittance increases from 85% to more than 90% and the electrical resistivity decreases from 1.13Ã10â3 Ωcm to 5.4Ã10â4 Ωcm after annealing treatment.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Xuhu Yu, Jin Ma, Feng Ji, Yuheng Wang, Xijian Zhang, Honglei Ma,