Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812654 | Thin Solid Films | 2005 | 5 Pages |
Abstract
Platinum thin films were prepared on Mo/Si(100) substrate by Argon ion beam assisted deposition. X-ray diffraction analysis showed that the crystal orientation in Pt film was influenced by the incidence angle of the Ar+ beam. The films exhibited preferred (111) orientation without concurrent ion beam bombardment. The films, which were deposited with simultaneous bombardment by a 500 eV Ar+ beam along normal direction, showed mixed (111) and (200) orientation. Tilting the Ar+ beam off the normal direction of the film surface, the film exhibited highly preferred (111) orientation, even at the tilting angle of 45°. The results suggested that the surface free energy of (111) plane is much lower than that of other lattice planes and dominates during the film growing.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
B.J. Jiang, J. Jiang, C.X. Ren, X.H. Liu, X. Wang, T. Feng, Z.X. Zhang, Z.T. Song, L.P. Zheng,