| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9812692 | Thin Solid Films | 2005 | 4 Pages |
Abstract
In this paper, we demonstrate the incorporation of hydrogen in ta-C films synthesised by mixing FCVA and PECVD. The hydrogen incorporation is realised by introducing a CH4 flow during the FCVA process. We present in this paper a comparison between ta-C and ta-C:H in terms of average mass density and hardness of the films in order to study the hydrogen influence on structure and properties.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
C. Meunier, F. Munnik, J. Stauffer, E. Germann, S. Mikhailov,