Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812698 | Thin Solid Films | 2005 | 6 Pages |
Abstract
Hydrogenated amorphous carbon nitride (a-CNx:H) particles and coatings have been prepared in a CH4/N2 13.56 MHz radiofrequency discharge. Particles and films have been examined by Scanning Electron Microscopy (SEM) and by infrared (IR) absorption spectroscopy for different nitrogen contents. SEM micrographs show that the dust particles are spherical with diameters in the range 0.2-4 μm. The surface morphology of the particles is strongly modified with the increase of the nitrogen content in the gas mixture. In the particle and film IR spectra, four predominant absorption bands have been observed. They reveal the presence of C-H, CC, CN and/or N-H (1300-1800 cmâ1), -CN and -NC (2000-2300 cmâ1), C-H (2800-3100 cmâ1) and N-H and/or O-H (3200-3600 cmâ1) bonds. These absorption bands are studied in order to determine the influence of the nitrogen incorporation.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jérémy Pereira, Isabelle Géraud-Grenier, Véronique Massereau-Guilbaud, André Plain,