Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812720 | Thin Solid Films | 2005 | 5 Pages |
Abstract
We report on details for film deposition and the film properties determined by Scanning Electron Microscope, Energy Dispersive X-ray spectroscopy, Transmission Electron Microscope and X-ray diffraction.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Andreas Heinrich, Bernd Renner, Robert Lux, Stefan G. Ebbinghaus, Armin Reller, Bernd Stritzker,