| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9812744 | Thin Solid Films | 2005 | 6 Pages |
Abstract
CrSix, Cr/CrSix/Cr/CrSix, and CrSix/Si/CrSix/Si formed on alumina have been analyzed for electrical properties. An as-deposited CrSix shows metallic nature, but the annealed sample shows semiconducting behavior. An annealed Cr/CrSix/Cr/CrSix shows an upward curvature of resistance curve. An annealed CrSix/Si/CrSix/Si shows metallic nature. The heating and cooling time of the last sample are the shortest. Auger analysis shows that the structure is a layer of a mixture of Si and CrSi2. The Si-rich CrSi2 layer is desirable as the heating material of thin film heater.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Chong-Geol Kim,