| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9812797 | Thin Solid Films | 2005 | 6 Pages |
Abstract
Zr1âxAlxN thin films, with 0â¤xâ¤0.73, have been synthesized by magnetron sputtering. The phases and the electrical and optical properties have been investigated. For xâ¤0.43, the Zr1âxAlxN films crystallize in cubic NaCl type of structure (B1 type), while at higher Al content, 0.43
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Physical Sciences and Engineering
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Authors
R. Lamni, R. Sanjinés, F. Lévy,