Article ID Journal Published Year Pages File Type
9812876 Thin Solid Films 2005 5 Pages PDF
Abstract
This article is focused on emission spectroscopy whose the main interest is in a non intrusive diagnostics, allowing a control and a piloting of the surface treatment process. To analyse a given plasma process, the emission spectroscopy must be coupled to the plasma kinetic equations. These mechanisms are described for a PVD process with a RF-activated magnetron DC cathode where it is shown how to follow the metal ionization degree with the example of Cu sputtering. In a second part of the article, it is shown how to measure the absolute densities of N- and O-atoms by NO titration in flowing N2 and O2 post-discharges, with applications to the activation of elastomers and to the sterilization of oral bacteria. In a chosen N2-O2 flowing microwave post-discharge, it has been obtained a decrease of 12 log (when 6 log is necessary for sterilization) for E. coli bacteria after a treatment time of 15 min.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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