| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9812884 | Thin Solid Films | 2005 | 4 Pages |
Abstract
The structure of the TaNx film transformed from B1-NaCl δ-TaNx to lamellar structured B1-NaCl δ-TaNx+ hexagonal É-TaNx or B1-NaCl δ-TaNx+hexagonal γ-TaNx with increasing ion energy at the same nitrogen fraction fN2. The hardness of the films also increased by the structural change. At the nitrogen fraction of 0.1-0.125, the structure of the TaNx films was changed from δ-TaNx+É-TaNx to δ-TaNx+γ-TaNx with increasing ion energy. However, at the nitrogen fraction of 0.15, the film structure did not change from δ-TaNx+É-TaNx over the whole range of the applied ion energy. The hardness increased significantly from 21.1 to 45.5 GPa with increasing ion energy.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
G.R. Lee, J.J. Lee, C.S. Shin, I. Petrov, J.E. Greene,