Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9812934 | Thin Solid Films | 2005 | 5 Pages |
Abstract
Diamond like carbon (DLC) films were synthesized by closed-field unbalanced magnetron sputtering (CFUBM) using carbon targets in Ar and Ar/C2H2 atmosphere. The deposition rate, structure and mechanical properties of these films were studied as a function of applied bias voltage on the substrate during deposition. The film structures were investigated using Raman spectroscopy. The hardness and elastic modulus were measured by nano-indentation tests and the friction coefficient of DLC films was measured by a ball-on-disc type wear tester. Raman analysis showed that sp3/sp2 ratio in DLC films changed with increasing substrate bias voltage. Hydrogenated DLC films deposited at the bias of â200 V exhibited a maximum hardness of 28 GPa and a relatively low friction coefficient of about 0.1.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Hyun S. Myung, Yong S. Park, Jae W. Lee, B. Hong, Jeon G. Han,