Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9813055 | Thin Solid Films | 2005 | 5 Pages |
Abstract
We have studied the structure of a high-porous silica thin film with pore sizes in nanometer scale using X-ray reflectivity and small angle X-ray scattering in grazing incidence geometry. The reflectivity data provide the information of surface and interface characteristics, density-depth profile, and porosity of the xerogel film. Whereas the grazing incidence small angle X-ray scattering results reveal the internal structure of the porous film, including pore shape and size, and averaged inter-pore spacing. It is demonstrated that the combination of these two techniques is a powerful structural characterization tool to porous thin films.
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Authors
C.-H. Hsu, U-Ser Jeng, Hsin-Yi Lee, Chih-Mon Huang, K.S. Liang, D. Windover, T.-M. Lu, C. Jin,