| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9816851 | Ultramicroscopy | 2005 | 4 Pages |
Abstract
Thin titanium film (3â¼8Â nm thick) can be oxidized completely with atomic force microscope anodic oxidation to form a metal-insulator-metal structure to fabricate various nanodevices. Whether the Ti film is oxidized down to the bottom is vital to the nanodevices. We have fabricated a delicate Ti oxide structure of two triangles on about 3Â nm thick Ti film. The theoretical calculation of the ratio of hox/dTi=0.58 indicates the Ti film has been oxidized completely.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Kuang Dengfeng, Liu Qinggang, Guo Weilian, Zhang Shilin, Hu Xiaotang,