| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9817488 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 7 Pages |
Abstract
The 14N(α,p)17O nuclear reaction cross-section was measured in the energy range 4.9-6.1 MeV at the laboratory angle θ = 172° in order to apply ion beam analysis to the detection of N in metal oxynitride layers. Comparison between the new calculation and data in literature was performed, highlighting important discrepancies between the new results and old cross-section data. Application of the new calculations to a standard TiN film suggests improved accuracy for the data in the present work.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
G. Della Mea, A. Patelli, S. Restello, V. Rigato, A. Vomiero,