Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817523 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 7 Pages |
Abstract
The accelerators at the II. Physikalisches Institut of the University of Göttingen were reinstalled in a new building during the summer of 2003. They cover a wide energy range and are used for many different applications. The highest energies are obtained with the 3Â MV Pelletron MaRPel, which is preferentially used for ion beam analysis. Ions in the energy range from 30Â keV to 1000Â keV are delivered by the 500Â kV heavy ion implanter IONAS which is used for analysis, implantation and ion beam modification. ADONIS and STRINGER are mass-separated ion beam deposition (MSIBD) systems which produce 30Â keV mass separated beams which can be decelerated to 20Â eV to synthesize isotopically pure hard coatings like cubic BN, tetrahedral bounded amorphous C (ta-C) and BxC. The low energy implanter IOSCHKA delivers ions of 10Â keV maximum, which can be slowed down to a few eV. The targets can be transferred in UHV to an STM set-up to investigate surface modifications after single ion impacts or the development of surface ripple patterns.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Uhrmacher, H. Hofsäss,