Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817547 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 4 Pages |
Abstract
High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the development of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
G.G. Bentini, M. Bianconi, A. Cerutti, M. Chiarini, G. Pennestrì, C. Sada, N. Argiolas, M. Bazzan, P. Mazzoldi, R. Guzzi,