Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817552 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
Experiments comparing nitrogen ion implantations in Al5052 by beam and plasma immersion were carried out. Beam implantation (BI) was carried out using a 100 keV, high current beam implanter while the plasma immersion ion implantation (PIII) was obtained using a glow discharge plasma source coupled to a pulsed high voltage supply. A nitrogen BI dose of 5 Ã 1017 cmâ2 at 100 keV was attained with near Gaussian implantation profile while the PIII was performed until we reached similar doses with a maximum energy of 15 keV. Implantation profiles were obtained by Auger electron spectroscopy (AES). X-ray diffraction (XRD) indicated the formation of AlN in both cases but it was more clearly demonstrated by high resolution AES. For BI treatment, a buried AlN layer was achieved while for PIII, a layer of AlNxOy close to the surface was seen. Due to the high temperature reached in the PIII processing (400 °C), a softening of the Al5052 bulk resulted while for BI processed samples with <200 °C an increase in hardness was observed.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Ueda, H. Reuther, C.M. Lepienski,