Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817571 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
Diffusion of Ag and Cu atoms in polyethyleneterephtalate (PET) and polyimide (PI) was studied using Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERDA). The samples were prepared by deposition of Ag and Cu thin layers on polymer surface using CVD and diode sputtering techniques. Samples were annealed at temperatures up to 240 °C. X-ray Photoelectron Spectroscopy (XPS) was used for determination of metal-polymer interaction and chemical state of atoms on metal-polymer interface. Faster diffusion of Ag atoms was observed from non-compact Ag layers prepared by diode sputtering than from those prepared by CVD technique. Ag atoms show higher mobility in PET in comparison with PI. XPS measurement gives an evidence of Ag clustering in Ag-PET samples prepared by cathode sputtering. In PI the Cu atoms exhibit higher diffusivity than Ag atoms due to their lower atomic radius.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Anna Macková, Vratislav PeÅina, Václav Å vorÄÃk, Josef Zemek,