RBS, ERDA and XPS study of Ag and Cu diffusion in PET and PI polymer foils

Diffusion of Ag and Cu atoms in polyethyleneterephtalate (PET) and polyimide (PI) was studied using Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERDA). The samples were prepared by deposition of Ag and Cu thin layers on polymer surface using CVD and diode sputtering techniques. Samples were annealed at temperatures up to 240 °C. X-ray Photoelectron Spectroscopy (XPS) was used for determination of metal-polymer interaction and chemical state of atoms on metal-polymer interface. Faster diffusion of Ag atoms was observed from non-compact Ag layers prepared by diode sputtering than from those prepared by CVD technique. Ag atoms show higher mobility in PET in comparison with PI. XPS measurement gives an evidence of Ag clustering in Ag-PET samples prepared by cathode sputtering. In PI the Cu atoms exhibit higher diffusivity than Ag atoms due to their lower atomic radius.