Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817589 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
TEM-SAED investigations were performed on PZT films, to elucidate the role of pyrolysis conditions on orientation selection. For short pyrolysis, occurrence of the metastable fluorite and the interfacial PtxPb template layer are the factors inducing the (1Â 1Â 1) PZT orientation. For advanced pyrolysis, the TiO2 interfacial layer could be responsible for (1Â 0Â 0) PZT strong orientation. To further investigate the stoichiometry of PZT and interfacial layers, we performed heavy ion RBS and NRBS measurements. Only a substoichiometric TiO2âx layer is found for the short pyrolized film whereas two Ti and O rich layers were observed for advanced pyrolysis. The thicker oxygen rich TiO2âx bottom layer, observed by TEM and NRBS analysis, could lead to ã1Â 0Â 0ã texture, observed for oxidizing conditions at the interface during pyrolysis.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
D. Pantelica, F. Vasiliu, P. Ionescu, F. Negoita,