Article ID Journal Published Year Pages File Type
9817624 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 4 Pages PDF
Abstract
A short overview is given on the status of SSLS, its four operational and one forthcoming experimental facilities and their use for material science exemplified by selected work on electromagnetic metamaterials, arrays of nanorods for near-IR photonics, thin films of low dielectric constant materials for semiconductor manufacturing, nanoparticles and art objects.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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