Analysis of zirconia films by grazing incidence X-ray absorption fine structure spectroscopy

X-ray absorption fine structure spectroscopy (XAFS) is used in for its non-destructive capability to probe and investigate nano-pores, dislocations or vacancies in zirconia films. XAFS is a powerful analytical tool that allows the collection of information to describe the atomic environment of component elements. This technique was applied in a grazing incidence (GI) mode to investigate layers obtained by zirconia sputtering on stainless steel and by zirconium alloy corrosion utilising the Zr K edge. XAFS analysis identify a decrease of next neighbour numbers of Zr in the corroded samples versus the sputtered samples. This may be due to the density of distortions for given average atom distances suggesting dislocations and defects. The discussion underlines that the technique reveals nano-pores, dislocations, vacancies or defect features difficult to observe using destructive techniques such as analytical electron microscopy. A strong decrease of the Zr next neighbour number is observed for zirconium alloy corrosion layers.