| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9817744 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
Advances in this field over the past few years and its relevance to future technology mean that it is now a powerful contender for direct write technology for future nodes 45Â nm and below.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
P. Mistry, I. Gomez-Morilla, G.W. Grime, R.P. Webb, R. Gwilliam, A. Cansell, M. Merchant, K.J. Kirkby, E.J. Teo, M.B.H. Breese, A.A. Bettiol, D.J. Blackwood, F. Watt,