Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817757 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 6 Pages |
Abstract
A new concept is proposed for enhancing the efficiency of an electron cyclotron resonance (ECR) plasma for production of multi-charged ions (TAIKOII). The plasma chamber is a circular cavity resonator with two metal plates. A fixed plate is installed at the tip of the ion extractor. The distance between the fixed plate and the antenna installed at the side wall is equal to a quarter of the guided wavelength λg for the circular TE01 mode microwave. A mobile plate is inserted from the opposite side along the geometrical axis to tune the microwave. Excitation of single TE01 mode has been confirmed. The electric field has only a circumferential component and is axially symmetric in the same direction as electron cyclotron motion. The peak value of the electric field is located at the ECR zone. Multi-charged ions are extracted by a voltage of 10 kV and the charge state distribution (CSD) of their ion currents are measured by using the sector magnet and the faraday cap. The extracted Ar4+ ion current changes periodically when the mobile plate moves in the plasma and the interval of the mobile and the fixed plates is several times λg/2 in the TE01 mode microwaves. We present and discuss production of multi-charged ions by applying the TE01 mode microwave in order to enhance efficiency of the ECR in the optimized magnetic field.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Yushi Kato, Hideyuki Furuki, Toyohisa Asaji, Hiroshi Sasaki, Sigeyuki Ishii,