Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817758 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
An ion source in form of the cavity resonator is designed and constructed on the basis of the above results. As a preliminary experiment, the ECR plasma is generated in a race-track magnetic field formed by permanent magnets. It is found that ion saturation current density increases stepwise as the metal plate is moved. This increase is considered to be caused by enhancing the intensity of electric field at the ECR zone in the resonator.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Toyohisa Asaji, Hiroshi Sasaki, Hideyuki Furuki, Yushi Kato, Shigeyuki Ishii, Motoichi Kanazawa, Junji Saito,