Article ID Journal Published Year Pages File Type
9817758 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 5 Pages PDF
Abstract
An ion source in form of the cavity resonator is designed and constructed on the basis of the above results. As a preliminary experiment, the ECR plasma is generated in a race-track magnetic field formed by permanent magnets. It is found that ion saturation current density increases stepwise as the metal plate is moved. This increase is considered to be caused by enhancing the intensity of electric field at the ECR zone in the resonator.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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