Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9817772 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
Considering the weight loss and the broadening of the extraction slit, the WL10 ion source showed a slightly better wear behavior than the molybdenum ion source. The wear of the graphite ion source was only slightly higher than that of the WL10 and the molybdenum ion source. However, since graphite showed the strongest reactions during BF3 operation, it is difficult to compare the results.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Volker Häublein, Simone Sadrawetz, Lothar Frey, Hans-Peter Martinz, Heiner Ryssel,