| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9818054 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
Highly charged Xe+q ions (up to q = 27) were produced by a 14.5 GHz electron cyclotron resonance ion source and used for solid surface modification experiments. AFM investigations show that hillock-like defects are created by ions with q = 20 and 24 on the surface of thin Se films as well as on the natural facets of multi-component SbSI crystals.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
S. Kökényesi, I. Iván, E. Takács, J. Pálinkás, S. Biri, A. Valek,