| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9818098 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 9 Pages |
Abstract
The paper gives a short history of computer simulation of ion-solid interaction and describes the main points of the different approaches. The results discussed are trajectories of moving atoms, backscattering and reflection, and to a larger extent sputtering by ion bombardment. Special emphasis is put on the work by the late Yamamura.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
W. Eckstein,