Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9818099 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 8 Pages |
Abstract
The MC simulation model based on the single scattering model was extended to the simulation of scattering of a penetrating ion in solid nearly 10 years later, i.e. in early 1970s, leading to more comprehensive understanding of atomic mixing and sputtering phenomena which are extensively discussed in this workshop.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Ryuichi Shimizu,