Article ID Journal Published Year Pages File Type
9818104 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 6 Pages PDF
Abstract
Kinetic energy distributions of MCsn+ (n = 0, 1, 2, …) molecular ions (M - target element to be analyzed and Cs+ - primary ion) emitted in the SIMS process have been studied for Al under varying Cs environments. Experiments were performed for different impact energies and angles. The peak shifts of the energy distributions are due to the changes in the instantaneous surface work functions. The impact angle variation on the work function change is found to be more sensitive than the impact energy variation on the same. Different work function changes for AlCs+ and AlCs2+ ions at the same impact angle signify that the emitting sites of these two species are different.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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