| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9818126 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
Based on coaxial impact-collision ion scattering spectroscopy (CAICISS) operable in a gas phase atmosphere, we have developed a low energy neutral atom scattering spectroscopy, in which a neutral He beam is used as a probe, to avoid the charging effects of insulator surfaces. In this technique, He gas is introduced into a charge exchange cell set in a sample chamber, and under He gas atmosphere He+ ions are neutralized just before impinging on the sample. The conversion efficiency of He+ to He0 was estimated to be about 40%. In order to demonstrate the performance of the technique, we successfully characterized MgO film deposited on fused silica, without the charging effects of insulator surfaces.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Shunjiro Fujii, Yusuke Michishita, Nobuhiko Miyamae, Kenjiro Oura, Mitsuhiro Katayama,