Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

High performance nano-tools are very important for nano-scale operations and analysis in various researches. To achieve best performance, tools should be made as three-dimensional (3-D) nano-structured devices. Therefore, we have fabricated 3-D nano-tools by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). Most recently, we used FIB-CVD to fabricate a novel 3-D nano-tool, a nano-net. Using this nano-net, we successfully captured polystyrene microspheres (diameter: 2.0 μm).