Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9818140 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 5 Pages |
Abstract
High performance nano-tools are very important for nano-scale operations and analysis in various researches. To achieve best performance, tools should be made as three-dimensional (3-D) nano-structured devices. Therefore, we have fabricated 3-D nano-tools by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). Most recently, we used FIB-CVD to fabricate a novel 3-D nano-tool, a nano-net. Using this nano-net, we successfully captured polystyrene microspheres (diameter: 2.0 μm).
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Reo Kometani, Takayuki Hoshino, Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito, Jun-ichi Fujita, Masahiko Ishida, Yukinori Ochiai, Shinji Matsui,