| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9818147 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 6 Pages |
Abstract
The conclusion from the calculations was that to obtain the smallest possible beam, the two-stage focusing system should be used. Such a focusing system (a doublet at each stage) has been chosen for the new sub-micron set-up at the Lund NMP laboratory. The first stage focuses the beam in an intermediate chamber, which has a high-resolution optical viewing system facilitating more control over the beam spot. This real image of the first stage is then used as a virtual object for the second stage.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Asad Shariff, Vaida Auzelyte, Mikael Elfman, Per Kristiansson, Klas Malmqvist, Christer Nilsson, Jan Pallon, Marie Wegdén,