Article ID Journal Published Year Pages File Type
9818151 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 6 Pages PDF
Abstract
This paper will detail the ion optical characteristics of the in-air scanning microbeam, and the methods used in the characterisation. A comparison between calculated optical properties of the in-air scanning microbeam, using the ray-tracing software TRAX, and the measured properties of the beam will be presented.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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