Article ID Journal Published Year Pages File Type
9818175 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 7 Pages PDF
Abstract
X-ray tube based, micro-beam X-ray fluorescence scanning spectrometer has been equipped with two energy dispersive X-ray detectors. The two-detector configuration allows for simultaneous collection of X-ray fluorescence (XRF) and transmitted X-ray beam signals with a spatial resolution in the range of 10-50 μm, depending on the X-ray focussing element in use. The XRF signal is collected with a standard, liquid nitrogen cooled Si(Li) detector. The X-ray beam transmitted through the sample is acquired with a thermoelectrically cooled, silicon drift (SD) detector. The data acquisition is carried out in a fully automatic way under control of the SPECTOR-LOCATOR software. The software controls the scanning procedure and X-ray spectra acquisition during the scan. The energy dispersive X-ray spectra collected at every “pixel” are stored for off-line processing. For selected regions of interest (ROI's), the element maps are constructed and displayed on-line. The spectrometer has been used for mapping elemental distributions and for performing 2D- and 3D-tomograpic imaging of minute objects in X-ray absorption and in X-ray fluorescence mode. A unique feature of the described system is simultaneous utilization of the two detectors, Si(Li) and SD, which adds new options for quantitative analysis and data interpretation. Examples of elemental mapping and 3D tomographic imaging as well as the advanced features of the SPECTOR-LOCATOR measurement control and data acquisition software are presented in this work.
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Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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