Article ID Journal Published Year Pages File Type
9818296 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 8 Pages PDF
Abstract
There are two different ways of measuring low energy ion scattering (LEIS), i.e. detection of ions and neutrals by means of time of flight (TOF-LEIS), or detection of ions only by means of an electrostatic analyser (ESA-LEIS). We discuss, how information on charge exchange can be extracted from ESA-LEIS and TOF-LEIS spectra, respectively and which is the level of accuracy that can be expected from these procedures.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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