Neutralization of keV Ne+ and Ar+ ions during grazing scattering from an Al(1Â 1Â 1) surface

Charge fractions after scattering of Ne+ ions, Ne0 atoms and Ar+ ions with keV energies under a grazing angle of incidence from an atomically clean and flat Al(1 1 1) surface are studied. For incoming Ne+ ions we observe defined ion fractions in the scattered beams, whereas for incident Ne0 atoms ion fractions are more than one order of magnitude smaller. This experimental result provides clear evidence for a survival of Ne+ ions over the whole scattering event. From the dependence of ion fractions on the perpendicular energy component we derive neutralization rates as function of distance from the surface. These rates compare well with recent theoretical calculations for the system He+-Al(1 1 1). For incident Ar+ ions no survival of ions is found and upper limits for the survival probability and lower limits for the neutralization rate are determined.