Article ID Journal Published Year Pages File Type
9818388 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2005 8 Pages PDF
Abstract
Furthermore, we study preferential sputter effects in heterogeneous systems. These consist of a random stoichiometric mixture containing equal concentrations of two species. We find that the more weakly bound species is preferentially sputtered. The preferentiality is roughly inversely proportional to the cohesive energy of the pertinent species. We also identify a mass effect on sputtering such that the lighter species is preferentially ejected.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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