| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9818424 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 4 Pages |
Abstract
We demonstrate and explain the different reactivities of these species at the surface (i.e. sticking efficiencies), as well as their ability to remove hydrogen from the surface (i.e. abstractions efficiencies).
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
E. Neyts, A. Bogaerts, R. Gijbels, J. Benedikta, M.C.M. van de Sanden,