| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9818433 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2005 | 4 Pages |
Abstract
The influence of a surface roughness on sputtering is studied using a Monte Carlo simulation code ACAT. In order to estimate this influence in ACAT calculation, the ACAT code is modified. The two-dimensional fractal surface model is applied to the ACAT code and a surface binding energy of a target material is estimated by a many-body tight-binding potential. Simulation results calculated with the modified ACAT are compared with experimental data and the standard planar ACAT on sputtering yields of a Mo surface irradiated with 2Â keV D+ ions. The modified ACAT code predicts well experimental data from rough surfaces compared with the standard planar ACAT code.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
T. Kenmotsu, Y. Yamamura, T. Muramoto, N. Hirotani,