Sims study of Ti-Zr-V NEG thermal activation process

Two samples of the same Ti:Zr:V stoichiometry were investigated following two different procedures of thermal activation. Step-by-step heating up to 320 °C (as model activation) and direct long time heating to 240 °C (continuous thermal activation) were applied. The SSIMS measurements are highly surface sensitive and reflect changes of the superficial oxide layer covering air-exposed surfaces during activation. To compare the final states of activation, depth profiles of surface layers have been used as well. Molecular ion intensity ratios MX+/M+ (X=O, H; M=Ti, Zr, V) have been considered to be directly coverage-sensitive and were monitored during the processes. The results were checked by comparison to corresponding XPS experiments.