Article ID Journal Published Year Pages File Type
9821532 Vacuum 2005 6 Pages PDF
Abstract
Two discharge modes can be sustained within certain limits. At RF input powers of 50-420 W an α-discharge can be sustained, however, below approximately 300 W the electrodes are only partially covered with the glow. At higher powers a breakdown occurs and a transition to a γ-discharge takes place, whereby the α-discharge dies out. The γ-discharge only covers a part of the electrodes and can be sustained down to powers of 50 W. Below this power the discharge extinguishes.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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