| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9821582 | Vacuum | 2005 | 5 Pages |
Abstract
Experimental data for the depth profiles of deposited/implanted atoms and for the thickness of films applied are also reported. The variation of the film thickness, the uniformity of the film, and the efficiency of mixing in the film-substrate system are discussed based on the experimental data.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
E.B. Bojko, Cz. Karwat, K. Kiszczak, M. Kolasik, T. KoÅtunowicz, F.F. Komarov, A.F. Komarov, Cz. Kozak, A. Wdowiak, P. Å»ukowski,