| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9821640 | Vacuum | 2005 | 5 Pages |
Abstract
Ellipsometric analysis of the buried graphitized layer formed in the He+-implanted and annealed diamond has been made. Spectroscopic ellipsometry data in the 360-1050 nm range at the incident angles between 65° and 75° were fitted based on a three-layer structure model. Using optical spectroscopy, atomic force and white-light interferometry microscopy data the n and k spectra of graphitized layer, its thickness and roughness were determined with high accuracy.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
A.V. Khomich, V.I. Kovalev, E.V. Zavedeev, R.A. Khmelnitskiy, A.A. Gippius,