| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9821645 | Vacuum | 2005 | 5 Pages |
Abstract
A system for impact excitation of the MF magnetron discharge is presented. A thyratron pulser excited a ringing circuit, which, in turn, supplied power to the pulsed MF discharge. The discharge current oscillation frequency was 1.76Â MHz, the impact excitation frequency was up to 8Â kHz. The discharge operated at voltages of several kilovolts and current amplitudes up to a hundred amperes without sparking and arcing on the Ti electrodes in inert and reactive gas and generated large-volume plasma. The proposed power supply combines the advantages of the MF bipolar discharge mode and the conventional pulse modulation.
Keywords
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Materials Science
Surfaces, Coatings and Films
Authors
Anatoly Kuzmichev, Oleg Bevza, Hartmut Steffen, Rainer Hippler,