Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9821652 | Vacuum | 2005 | 6 Pages |
Abstract
The experimental measurements and computer simulation results of the intensity of the Ar+ ion current emitted from the hollow cathode ion source as a function of extraction voltage are presented in the paper. The computer simulations of the phenomena inside the ion chamber and ion beam formation were done using modified version of the TRQR code based on particle-in-cell (PiC) method. The agreement between experiment and calculated results is quite good.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Turek, A. Droździel, K. Pyszniak, J. Sielanko,