Article ID Journal Published Year Pages File Type
9821652 Vacuum 2005 6 Pages PDF
Abstract
The experimental measurements and computer simulation results of the intensity of the Ar+ ion current emitted from the hollow cathode ion source as a function of extraction voltage are presented in the paper. The computer simulations of the phenomena inside the ion chamber and ion beam formation were done using modified version of the TRQR code based on particle-in-cell (PiC) method. The agreement between experiment and calculated results is quite good.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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