Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9829352 | Journal of Crystal Growth | 2005 | 8 Pages |
Abstract
Artificial superlattices consisting of BaTiO3 (BTO) and SrTiO3 (STO) sublayers were epitaxially grown on an LaNiO3-coated SrTiO3 (0Â 0Â 1) single-crystal substrate by a triple-gun radio-frequency (RF) magnetron sputtering system. X-ray reflectivity and high-resolution diffraction measurements were employed to characterize the microstructure of these films. Formation of a superlattice structure was confirmed from the appearance of Bragg peaks separated by Kiessig fringes in X-ray reflectivity curves and the (0Â 0Â l) Bragg reflection of X-ray. The clearly discernible main feature and satellite features on both sides of the substrate about the (0Â 0Â 2) STO Bragg peak indicate the high quality of the BTO/STO artificial superlattice structure formed on a LaNiO3-coated SrTiO3 substrate. These BTO/STO artificial superlattices show a significant enhancement of dielectric constant relative to BTO and STO single layers of the same thickness. The higher the deposition temperature, the larger the dielectric constant of the films present; the smaller the stacking periodicity of superlattices, the larger the dielectric constant and dielectric loss.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Hsi-Nao Tsai, Yuan-Chang Liang, Hsin-Yi Lee,