Article ID Journal Published Year Pages File Type
9829362 Journal of Crystal Growth 2005 6 Pages PDF
Abstract
Na0.5Bi0.5TiO3 thin films have been grown on p-type Si(1 1 1) and Pt/Ti/SiO2/Si substrates by a method of chemical solution decomposition. The structure and microscopy were studied by X-ray diffraction and atomic force microscopy, respectively. The electrical measurements were conducted on metal-ferroelectric-semiconductor or metal-ferroelectric-metal capacitors. The films show low leakage current. They also exhibit good ferroelectric and dielectric properties.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
Authors
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