Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9829397 | Journal of Crystal Growth | 2005 | 6 Pages |
Abstract
We report the discovery of vertically aligned nano-scale diamond tips grown on the rugged polycrystalline diamond/Si substrates in a planar microwave plasma enhanced chemical vapor deposition system. The diamond nanotips exhibit three different morphologies (C-, cone-, and rod-like-shape) that can be monitored by varying substrate temperature and bias voltage. Experimental results indicate that the rod-like nanotips exhibit the best diamond quality, C-shape nanotips the second best, and the cone-shape nanotips the worst.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Ya Ko Chih, Jennchang Hwang, Yu Lun Chueh, Li Jen Chou, An Pin Lee, Chwung Shan Kou,