Temperature distribution in an inductively heated CZ crucible

Temperature field in an inductively heated graphite crucible in a Czochralski crystal growth furnace is investigated experimentally and numerically at three different HF current densities. The results show that the temperature distribution in the crucible is affected by not only the radiative heat transfer but also the conductive and natural convective heat transfer in the furnace. Further, if a quartz glass tube is installed around the crucible, the natural convection is dramatically suppressed, thus higher crucible temperature is obtained. Numerical results also reveal that the temperature distributions in the crucible are affected by the relative position between crucible and induction coil due to the modification of the electromagnetic field in the CZ furnace.