Article ID Journal Published Year Pages File Type
9829869 Journal of Crystal Growth 2005 7 Pages PDF
Abstract
The realisation of III-V quantum cascade lasers has initiated a strong interest in developing a Si/SiGe-based quantum cascade laser over the last 3 years. Most efforts were focused on the growth of strain-balanced Si/SiGe superlattices on strain-relaxed SiGe virtual substrates. This paper discusses the progress so far and addresses some of the material issues related to the epitaxy of Si/SiGe quantum cascade structures, including strain-stress balance and production of strain-relaxed SiGe virtual substrates.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
Authors
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